The EA6000VX High-Sensitivity XRF Analyzer is capable of determining hazardous
substances over entire surfaces as well as measuring microscopic points in a specified
area tasks that are not possible using conventional XRF instruments.
1. High-speed Mapping
The high count rate detector (max. 150,000 cps) and the large stage that scans a max. 250 ㎜ × 200 ㎜
area provide high-speed mapping. For example, when mapping a 100 ㎜ × 100 ㎜ area, the EA6000VX
can detect and specify the location of lead contained in the terminal of a mounting board in just a few
2. Continuous multi-point Measurements
With an auto-sampler, up to 500 points can be specified and continuously measured.
Thus, measuring large samples can be performed with high throughput and minimal user intervention.
3. High Precision Overlap Function
By adopting the Telecentric Lens System and the high-speed and high-precision XY stage, it is
possible to precisely overlap the elemental mapping image and the optical image.
It is easy to grasp the distribution of specific elements in specific parts of micro parts.
Any position up to 250 ㎜ × 200 ㎜ is a vertical observation image, so the difference in positioning
in the wide area is precise within 100㎛.
4. Microscopic Area Coating Thickness Measurements
The EA6000VX is capable of coating thickness measurements typical of the FT series including coating
thickness measurement of ultra-thin Au films. Analysis of hazardous substances such as Pb in plating
can be measured simultaneously with coating thickness measurements. For example, possibilities include
composition measurement of hazardous substances in Pb-free solder plating, Sn plating of lead frames,
and electroless Ni plating.
5. Standard reference materials for various environmental regulations
A variety of standard reference samples developed and manufactured in-house are available those include
not only for the RoHS restricted elements (Cd, Pb, Hg, Br, and Cr), but also for other elements such as
chlorine (Cl), antimony (Sb) and tin (Sn) and so forth.
6. Light Element Measurement (Optional)
The He Purge option enables the analysis of light elements starting with Na.
The system purges with He only while making measurements, providing stable, cost-effective analysis.
7. See-through Mapping Fuction
Mapping images of various elements, such as Pb on boards, can be obtained without taking apart
products or even knowing anything about the internal structure of laptop computers and cell phones,
By comparing the element mapping images obtained by penetrating X-rays, a great deal of information
can be obtained about the structure and internal components.
8. Contaminant Analysis
With its high-speed mapping function, the EA6000VX is able to detect and locate small metal contaminants
in the tens of micrometers size range for a wide measurement area. (at a maximum of 250 ㎜ × 200 ㎜)
Small or minute amount of contaminant contained in organic substances including resin, can be also detected.
9. Technologically Enhanced Operability
- Auto Approach and Sample Collision Prevention Mechanism-
Auto Approach Function measures the sample height and automatically adjusts the distance between
sample and detector so that operator can easily measure samples with complicated shapes. In the case of
manual operation, Sample Collision Prevention Mechanism prevents sample damages.
Atomic nos. 11 (Na) to 92 (U)
※When using He Purge Option
Solid / Powder / Liquid
Small Air-cooled x-ray tube (Rh or W Target)
Voltage : 15 kV, 30 kV, 40 kV, 50 kV
Current : 20~1000㎂
Vortex® (SDD) ※No liquid nitrogen required
0.2, 0.5, 1.2, 3.0 ㎜φ (Automatic conversion)
Color CCD camera (2 system)
6 filters automatic switching
250 (W) × 200 (D) × 150 (H) ㎜
750 (W) × 740 (D) × 783 (H) ㎜
AC100 ~ 240V (50 / 60Hz) / 400VA
Door interlock, Crash protection,
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